Abstract
Growth of helium bubbles near the surface of metals leads to various morphology changes when sufficient helium ions are continuously implanted on the surface. In this study, low energy (< 100 eV) helium plasma irradiations to various noble metals were conducted, and consequent surface morphology changes were analyzed. It was found that fiberform nanostructures were formed by the helium plasma irradiation on rhodium and ruthenium thin films, which were deposited by magnetron sputtering, and on platinum and iridium wires. Growth of fiberform structures were not identified on gold, silver, and palladium samples exposed to helium plasmas even though the irradiations were conducted at various surface temperatures, though pinholes were observed on palladium surface. We discussed the relation between the morphology changes and material properties.
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