Further characterization of Pd-coated copper wire on wirebonding process: from a nanoscale perspective

Abstract

The objective of this research is to investigate the nanomechanical properties of ultra-thin Pd-coated copper (Cu) wire (ψ = 0.6 mil) and nanotribology along the interfacial between free air ball (FAB) and aluminum (Al) bond pad during wirebonding process. Two major analyses are conducted in the present paper. In the first, the characteristic of heat affected zone and FAB for Cu wire has been carefully experimental measured. Nanoscale interfacial tribology behavior between Cu FAB and Al pad is examined by atomic force microscopy. Secondary, the dynamic response on Al bond pad and beneath the pad during wirebonding process has been successfully predicted by finite element analysis. Micro-tensile mechanical properties of Cu wire before and after electric flame-off (EFO) process have been investigated by self-design pull test fixture. Experimental obtained hardening constant in Hall–Petch equation has significantly influence on the localize stressed area on Al pad. This would result in Al pad squeezing (large plastic deformation) around the smashed FAB during impact stage and the consequent thermosonic vibration stage. Microstructure of FAB is also carefully investigated by nanoindentation instruments. A real-time secondary EFO scheme has been conducted to reduce the strength of Cu wire and increase the bondability. All the measured data serve as material inputs for the finite element model based on explicit software ANSYS/LS-DYNA. In addition, nanoscale bondability on Cu-Al intermetallic compound is simulated by molecular dynamics. A series of comprehensive parametric studies were conducted in this research.