Abstract
This paper presents a summary of fundamental principles and applications of modulated induction thermal plasmas that have been developed by the author's group. The modulated induction thermal plasma is established using a coil current that is modulated to the order of several hundreds of amperes at a millisecond time scale. Such a large current modulation enables the creation of a large disturbance in high-pressure and high-temperature plasmas. It also enables control of the temperature and radical density in thermal plasmas in a time domain. Examples are described for application of the modulated induction thermal plasma to surface modification. Thermally and chemically non- equilibrium effects are essential in temperature and radical density fields. The latest result is also presented for various applications of modulated induction thermal plasmas. Finally, dynamic behaviors of a recently developed arbitrary- waveform modulated induction thermal plasma are also introduced as a new type of modulated induction thermal plasma.
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