Fundamental Study on Multi-wire EDM Slicing of SiC by Wire Electrode with Track-shaped Section

Abstract

High efficient and precise slicing method is required for the slicing of silicon carbide ingot. The newly developed multi-wire electrical discharge slicing method would decrease the kerf width and the cracks generated on machined surface. However, much higher wire tension is required in order to reduce wire vibration and to perform a smaller kerf width. Thin wire electrode with round section does not have enough cross sectional area under the high wire tension condition. Therefore, a wire electrode with track- shaped section was proposed and applied to the wire EDM slicing of silicon carbide ingot. The running control of wire electrode with track-shaped section was experimentally investigated. The side support method with fixture plates could decrease the kerf width by brass coated steel wire electrode with track-shaped section. The parallel drawing type traverser and the short distance setting points of side support fixture plates could perform the smaller vibration of w ire electrode with track-shaped section and the decrease of kerf width.