Fundamental study on CNC polishing method with inner channel liquid supply

Abstract

The various optical components have wide applications in aerospace industries. In the manufacturing process of optical components that are made of optical glass materials, the main challenges still are how to ensure the high requirements in dimensional accuracy and surface quality. In this paper, the CNC polishing method with inner channel liquid supply (ICLS) is proposed to polish glass materials based on the chemical mechanical polishing mechanism. The comparative experiment with both inner and external liquid supply was designed, and it is found that the successive and steady material removal rate (MRR) can be achieved by using the proposed polishing method. Then, the effect of polishing pressure, tool rotation speed, and polishing time on polishing quality was analyzed with single-factor experiments. Finally, the optimal polishing parameters were obtained with the orthogonal experiment. The results show that the average surface roughness is reduced from 238.16 to 1.34 nm, and the nanoscale super-smooth surface is achieved, which proves the feasibility of the CNC polishing method with ICLS.