Fundamental properties of a planar type of inductively coupled thermal plasma with current modulation

Abstract

A novel planar type of induction thermal plasma system with current modulation has been developed using a rectangular quartz vessel instead of a conventional cylindrical tube for thermal plasma processing for large-area material surface. To expand the generated thermal plasma laterally, the rectangular coil is used around the planar torch. Electrical properties including effective electrical impedance and instantaneous effective power of the thermal plasma at a pressure of 30 Torr at an input power about 10 kW were studied for the developed Ar planar type of induction thermal plasma. The spatial distribution of Ar excitation temperature in a planar torch was measured to elucidate fundamental aspects of a planar thermal plasma. Furthermore, the effect of coil current modulation was studied for changes in electrical properties and temperature, and their controllability in a planar thermal plasma.