Fundamental properties characterizing low-pressure microwave-induced plasmas as excitation sources for spectroanalytical chemistry

Abstract

Experimental measurements of the spectroscopic temperature and the electron temperature in low-pressure rare gas plasmas sustained by a microwave generator operating at 2450 MHz have revealed divergent values. These measurements have been interpreted on the basis of a radiative recombination model originally proposed by Schlüter. The importance of Penning ionization by metastable rare gas atoms in the excitation of foreign atoms has been discussed in terms of this model. On the basis of the radiative recombination model for these plasmas, the parameters of analytical importance are the concentration and energy of electrons in a high energy electron group, the concentration and energy of electrons in a low energy electron group, and the concentration of metastable rare gas atoms. Measurements of the spectroscopic temperature of an argon plasma have revealed that the energy of electrons in the low energy electron group is not greatly affected by applied microwave power and pressure over the range from 1–25 torr. The energy of electrons in the high energy electron group is not greatly affected by pressure and applied microwave power over the range studied, but has been shown to depend on the ionization potential of the plasma gas. The total electron concentration is not greatly affected by gas pressure for low applied powers, but varies with applied power, particularly at low pressures. The concentration of metastable argon atoms has been shown to depend on both the applied power and pressure. Studies of the excitation of mercury by these plasmas have led to results which are consistent with the radiative recombination model.