Abstract

It is expected that a computer aided TEM which incorporates a frame memory system and a TV camera, provides many useful functions which have not yet been made available. We constructed an experimental TEM, shown in Fig. 1, and made some experiments which are described below.Dual Magnification Display of Specimen Images; If low and high magnification images are displayed at the same time, field selection would be a lot easier. This method has been already established in SEM. In our TEM, this is performed by memorizing the low magnification image in a frame memory, and by controlling the specimen stage by a computer. The CRT displays the low magnification image stored in the memory and a mask which indicates the specimen image area under the high magnification condition. The operator moves the mask and sets it on the area of interest. Then electron microscope magnification is changes from low to high. The stage is moved automatically, corresponding to a new masked position. We see a high magnification image on the fluorescent screen and also on the other CRT. The low magnification image stored in the memory is not changed, and the next specimen area for high magnification is readily chosen by moving the mask.

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