Abstract
The applicability of luminescent porous silicon (PS) to optoelectronic integration has been studied in terms of design and fabrication of Si microphotonic devices such as optical waveguides and planar microcavities. The design concept of PS photonic devices is based on precise control of the refractive index of PS. In these devices, the stacked PS layers are formed on Si substrates simply by modulating the anodization current density. When excited optically and electrically, the devices operate as an edge-emitting waveguide with polarization-mode-selective function or a Fabry–Perot resonator. Some fundamental aspects of the device operation are discussed. The results presented here suggest that PS is an advanced material with useful functions for applications to silicon-based optoelectronic integration.
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