Abstract

This chapter describes some approaches in materials processing for various sensor technologies. Depending on the applications, a wide range of material processing techniques have been reported. Chemical vapor deposition (CVD), physical vapor deposition (PVD) techniques, electrochemical deposition (ED), and atomic layer deposition (ALD) are some methods in the thin-film processing of sensors. In other terms, screen-printing, dip-coating, and spin-coating are also chosen for various preparation of the thick film. Principles of operation and some examples from research are discussed in this chapter.

Full Text
Paper version not known

Talk to us

Join us for a 30 min session where you can share your feedback and ask us any queries you have

Schedule a call

Disclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.