Abstract
A novel functional multisensor for temperature and subsequent measurement of three orthogonal magnetic-field components using the same transducer zone is presented. One central emitter, two symmetrically positioned base contacts and two pairs of output ohmic terminals on a silicon substrate, close to the bases, are implemented. Three subsequent coupling arrangements of the output terminals use the same element at different times. Temperature is measured through the voltage on the forward biased p+-n emitter junction at constant supply current. The channel sensitivities are Sx = 7V/AT, Sy = 9V/AT and Sz = 11.3V/AT. The thermo-sensitivity is KEB = 1.82mV/°C at supply current of 1mA. Magnetic induction does not perturb thermometric voltage within a wide range, - 0.8 T ≤ B ≤ 0.8 T. The spatial resolution reaches about 110 х 90 х 40μm3.
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