Abstract
Functional coatings constructed as bilayer or multilayer (10-layer) structures were deposited from pure tetravinylsilane monomer or a mixture of monomer and oxygen gas using plasma-enhanced chemical vapor deposition. Selected deposition conditions were used to deposit a plasma polymer layer of A and B type, which differ markedly in chemical and physical properties. The thickness of individual layers in the layered structure was 0.1–0.9 µm with a total coating thickness of 1 µm. Spectroscopic ellipsometry enabled us to differentiate and analyze the individual layers in structured coatings.
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