Functional Design of a 6-DOF Platform for Micro-Positioning

Matteo-Claudio Palpacelli,Giacomo Palmieri,Ettore Landini,Fabio D’Anca,Luca Carbonari,Guido Giorgi

doi:10.3390/robotics9040099

Abstract

Parallel kinematic machines (PKMs) have demonstrated their potential in many applications when high stiffness and accuracy are needed, even at micro- and nanoscales. The present paper is focused on the functional design of a parallel platform providing high accuracy and repeatability in full spatial motion. The hexaglide architecture with 6-PSS kinematics was demonstrated as the best solution according to the specifications provided by an important Italian company active in the field of micro-positioning, particularly in vacuum applications. All the steps needed to prove the applicability of such kinematics at the microscale and their inherent advantages are presented. First, the kinematic model of the manipulator based on the study’s parametrization is provided. A global conditioning index (GCI) is proposed in order to optimize the kinetostatic performance of the robot, so that precise positioning in the required platform workspace is guaranteed avoiding singular configurations. Some numerical simulations demonstrate the effectiveness of the study. Finally, some details about the realization of a physical prototype are given.

Highlights

The ability to change the orientation and position of a sample with high precision has become an indispensable requisite in many applications, ranging from testing of microelectronic components, to assembly of optoelectronic components, to measurements in extreme environments such as ultra-high vacuums, to exposure to cryogenic radiation and temperature typical of synchrotrons, and more
These functions are normally performed by robotic platforms with limited workspace and a small range of rotation
Many examples of commercial devices based on parallel kinematics architectures can be found in industry, especially in the measurement sector

Summary

Introduction

The ability to change the orientation and position of a sample with high precision has become an indispensable requisite in many applications, ranging from testing of microelectronic components, to assembly of optoelectronic components, to measurements in extreme environments such as ultra-high vacuums, to exposure to cryogenic radiation and temperature typical of synchrotrons, and more. These functions are normally performed by robotic platforms with limited workspace and a small range of rotation. Parallel kinematic machines (PKMs) are usually preferred to serial devices because of their intrinsic features, such as stiffness, positioning accuracy, and repeatability. Many examples of commercial devices based on parallel kinematics architectures can be found in industry, especially in the measurement sector.

Methods

Results

Conclusion