Abstract

AbstractPulsed laser deposition has been used to fabricate thin-film capacitor structures in which the dielectric layer is a superlattice. The properties of two superlattice systems were investigated as a function of superlattice wavelength (δ) – one based on barium strontium titanate and the other on lead-based relaxor electroceramics. In both systems the dielectric constant was significantly enhanced at stacking wavelengths of a few unit cells. However, the dielectric enhancement seen in the barium strontium titanate superlattices was found to be due to Maxwell-Wagner effects, whereas in the relaxor superlattices Maxwell-Wagner behaviour was not evident; rather, the dielectric enhancement was associated with the onset of polar coupling aroundδ ∼ 10nm.

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