Abstract
In this work, we have successfully fabricated bottom gate fully transparent tin-doped zinc oxide thin film transistors (TZO TFTs) fabricated on flexible plastic substrate at low temperature by RF magnetron sputtering. The effect of O2/Ar gas flow ratio during channel deposition on the electrical properties of TZO TFTs was investigated, and we found that the O2/Ar gas flow ratio have a great influence on the electrical properties. TZO TFTs on flexible substrate has very nice electrical characteristics with a low off-state current (Ioff) of 3 pA, a high on/off current ratio of 2 × 107, a high saturation mobility (μsat) of 66.7 cm2/V•s, a steep subthreshold slope (SS) of 333 mV/decade and a threshold voltage (Vth) of 1.2 V. Root-Mean-Square (RMS) roughness of TZO thin film is about 0.52 nm. The transmittance of TZO thin film is about 98%. These results highlight that the excellent device performance can be realized in TZO film and TZO TFT can be a promising candidate for flexible displays.
Highlights
In this work, we have successfully fabricated bottom gate fully transparent tin-doped zinc oxide thin film transistors (TZO TFTs) fabricated on flexible plastic substrate at low temperature by RF magnetron sputtering
We turned to research the electrical performance of TZO TFTs by adjusting oxygen partial pressure (OPP) during the fabrication of the TZO film as active layer
We analyzed the electrical characteristics of the four samples by a semiconductor parametric analyzer (Agilent 4156 C) at room temperature
Summary
Using the Scherer formula (D =(KΛ)/(Bcosθ)), we can get the average grain size: 20.7 nm (O2/Ar = 0/100) and 19.6 nm (O2/Ar = 10/90) respectively The TZO TFTs as-fabricated exhibited excellent electrical properties, with a high Ion/Ioff of 2 × 107, a steep SS of 0.333 V/dec, a high μsof 66.7 cm2/V·s and a low Vth of 1.20 V, as the OPP was 10% These results highlight TFTs on flexible substrates using TZO films as channel layer material can realize excellent device performance and TZO TFT can be a promising candidate for transparent flexible displays
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