Abstract

In recent years, transparent electrode materials have had a positive effect on improving the responsivity of photodetectors by increasing the effective illumination area of devices due to their high transmittance. In this work, by using radio frequency magnetron sputtering and simple mask technology, an amorphous Ga2O3-based solar-blind UV photodetector with graphitic carbon (C) electrodes was created. The device exhibits a high responsivity of 16.34 A/W, an external quantum efficiency of 7979%, and excellent detectivity of 1.19 × 1013 Jones at room temperature under a light density of 5 μw/cm2. It has been proved that C electrodes can replace the traditional noble metal electrode. Additionally, the potential of the transparent photodetector array in solar-blind imaging is explored. We believe that the present study will pave the way for the preparation of a fully transparent and high-response solar-blind ultraviolet photodetector array.

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