Abstract

For the first time, a complete 3-dimensional sound intensity sensor - consisting of 4 particle velocity sensors and a pressure microphone - has been integrated on a single chip, providing the possibility to do nearly point measurements of acoustic particle velocity, sound pressure, and therefore sound intensity. Principally the sensor consists of two distinct designs; a pressure sensor and particle velocity sensors. In this paper the design of the sensor, fabrication and measurement results are discussed and compared with theoretical results.

Full Text
Published version (Free)

Talk to us

Join us for a 30 min session where you can share your feedback and ask us any queries you have

Schedule a call