Fully Automatic Wafer-Scale Micro/Nano Manipulation Based on Optically Induced Dielectrophoresis

Abstract

Optically induced dielectrophoresis (ODEP) has been proved experimentally as a powerful method for efficiently manipulating some micro-scale, or even nano-scale objects. However, few ODEP platforms have been demonstrated towards the fully automatic wafer-scale manipulation and rapid fabrication of micro and nano sensors and devices. That would be of great significance to the application and industrialization of micro and nano materials. In this paper, an innovative ODEP platform for reconfigurable and automatic micro/nano-scale material manipulation is presented by combining microactuation and microvision analysis with ODEP technology. The ODEP chip consists of a typical photoconductive layer of amorphous silicon, which generates a nonuniform electric field at the light-illuminated region to induce dielectrophoretic (DEP) force for manipulating particles within the chip. A high resolution 3D motorized stage enables an accurate and rapid movement of the chip in wafer-scale. The microvision analysis program automatically recognizes the positions and sizes of randomly distributed particles and creates direct image patterns to manipulate the selected particles to form a predetermined pattern in predesired position. The programmed dynamic reconfigurable optical patterns provide increased functionality and versatility in particle manipulation. The patterning of polystyrene beads with different sizes is accomplished. This platform may be promising for rapid and wafer-scale fabrication of micro and nano sensors and devices, high-throughput bio-sample pretreatment and other applications requiring massively parallel manipulation.