Full-field x-ray nano-imaging at SSRF

Abstract

ABSTRACT Full field X-ray nano-imaging focusing on material science is under developing at SSRF. A dedicated full field X-ray nano-imaging beamline based on bending magnet will be built in the SSRF phase-II project. The beamline aims at the 3D imaging of the nano-scale inner structures. The photon energy range is of 5-14keV. The design goals with the field of view (FOV) of 20µm and a spatial resolution of 20nm are proposed at 8 keV, taking a Fresnel zone plate (FZP) with outermost zone width of 25 nm. Futhermore, an X-ray nano-imaging microscope is under developing at the SSRF BL13W beamline, in which a larger FOV will be emphasized. This microscope is based on a beam shaper and a zone plate using both absorption contrast and Zernike phase contrast, with the optimized energy set to 10keV. The detailed design and the progress of the project will be introduced. Keywords: Full field X-ray nano-imaging; Synchrotron radiation; Beam shaper 1. INTRODUCTION In the recent past, the full field transmission X-ray microscopy (TXM) based monochromatic hard X-rays from synchrotron radiation has undergone rapid improvements, and has been used to elucidate the nanoscale structure of a variety of samples, achieved a spatial resolutions better than 25nm