Abstract

The driving force for the semiconductor industry growth has been the elegant scaling nature of CMOS technology. In future CMOS technology generations, supply and threshold voltages will have to continually scale to sustain performance increase, control switching power dissipation, and maintain reliability. These continual scaling requirements on supply and threshold voltages pose several technology and circuit design challenges. With threshold voltage scaling, subthreshold leakage power is expected to become a significant portion of the total power in future CMOS systems. Therefore, it becomes crucial to predict and reduce subthreshold leakage power of such systems. In the first part of this paper, we present a subthreshold leakage power prediction model that takes into account within-die threshold voltage variation. Statistical measurements of 32-bit microprocessors in 0.18-/spl mu/m CMOS confirm that the mean error of the model is 4%. In the second part of this paper, we present the use of stacked devices to reduce system subthreshold leakage power without reducing system performance. A model to predict the scaling nature of this stack effect and verification of the model through statistical device measurements in 0.18-/spl mu/m and 0.13-/spl mu/m are presented. Measurements also demonstrate reduction in threshold voltage variation for stacked devices compared to nonstack devices. Comparison of the stack effect to the use of high threshold voltage or longer channel length devices for subthreshold leakage reduction is also discussed.

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