FROM Si NANOWIRES TO Ge NANOCRYSTALS FOR VIS-NIR-SWIR SENSORS AND NON-VOLATILE MEMORIES: A REVIEW

Abstract

"Nanocrystalline Si and Ge are ofhigh interestfor integrated Si photonics related to light emission, opticul sensors, photodetectors, solar energy harvesting and conversion devices, and also forfloating gate non-volatile memories (NVMs). In this review, we have focused on nanocrystalline porous Si (nc-PS) with extension to Si nanodots, and Ge nanocrystals (NCs)Zquantum dots (QDs)/nanoparticles (NPs) embedded in oxides (SiCh, TiCE, HfCh, AI2O3). The great asset ofnc-PS is its intense photoluminescence in VIS at room temperature (RT), while Ge NCs/NPs embedded in oxides show high photosensitivity in VISNIR-SWIR in the spectral photocurrent up to 1325 nm at RT. Ge NCs/NPs/QDsfloating gate NVMs present high memory performance, the retention characteristics corresponding to the state of the art for NCs floating gate NVMs. We prove the relevance of controlling the preparation parametersfor obtainingfilms with targetedphotoluminescence, photosensitivity and charge storage properties for applications, e.g. VIS-NIR-SWIR optical sensors and photodetectors, and electronic and photoelectric NVMs. We evidence the correlation of preparation conditions, morphology, composition and crystalline structure with optical, electrical, photoelectrical and charge storage properties and also evidence the contribution ofquantum confinement effect, localized States and trapping centers."