Abstract
The precise manipulation of small particles is not a trivial task. In a first effort, a nanorobot system was built based on a robot with vision feedback and a micromachined gripper. It was suitable for handling particles down to 100 μ with submicron accuracy in a normal environment. For smaller particles stiction effects prohibit the release of the particles in a controlled way. Stiction effects are avoided in a fluid environment. As an example, a system of channels is described in detail that is able to feed micron sized particles in a fluid environment to the desired places.
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