Abstract
A set of cleavage experiments with strip-shaped single-crystal silicon specimens subjected to three-point bending is reported. The experiments enabled examination of the relationships between the dynamic energy release rate, the velocity, the orientation-dependent cleavage energy, and the cleavage plane of propagation. Dynamic crack propagation experiments show that when a [0 0 1] silicon single crystal is fractured under three-point bending at ‘parallel’ velocity (directly measured at the bottom surface of the specimen) of up to 1500 m/ s , it prefers to cleave along the vertical (1 1 0) plane, while when the specimen is fractured under the same conditions but at a velocity higher than 2900 m/ s , it cleaves along the inclined (1 1 1) plane. At intermediate velocities, the crack will deflect from the (1 1 0) plane to the (1 1 1) plane. Crack velocity was determined by the initial notch length. The local (calculated) velocity of deflection between the cleavage planes ranges from 2900 m/ s , for a crack propagating on the (1 1 0) plane in the [1 1 ̄ 0] direction, to about 30 m/ s , for a crack on the (1 1 0) plane, but in the [0 0 1] direction. It is suggested that the cause of the deflection phenomenon is the anisotropic, velocity-dependent cleavage energy, resulted phonon radiation caused by anisotropic, velocity-dependent lattice vibrations. We have studied the effect of material properties and propose selection criteria to explain the deflection phenomenon: the crack will deflect to the plane of least-energy, for which G− Γ i ( V)=max, or to the plane with maximum crack tip velocity, V i ( Γ)=max.
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