Abstract

We report the development of a new class of miniature all-polymer flow sensors that closely mimic the intricate morphology of the mechanosensory ciliary bundles in biological hair cells. An artificial ciliary bundle is achieved by fabricating bundled polydimethylsiloxane (PDMS) micro-pillars with graded heights and electrospinning polyvinylidenefluoride (PVDF) piezoelectric nanofiber tip links. The piezoelectric nature of a single nanofiber tip link is confirmed by X-ray diffraction (XRD) and Fourier transform infrared spectroscopy (FTIR). Rheology and nanoindentation experiments are used to ensure that the viscous properties of the hyaluronic acid (HA)-based hydrogel are close to the biological cupula. A dome-shaped HA hydrogel cupula that encapsulates the artificial hair cell bundle is formed through precision drop-casting and swelling processes. Fluid drag force actuates the hydrogel cupula and deflects the micro-pillar bundle, stretching the nanofibers and generating electric charges. Functioning with principles analogous to the hair bundles, the sensors achieve a sensitivity and threshold detection limit of 300 mV/(m/s) and 8 μm/s, respectively. These self-powered, sensitive, flexible, biocompatibale and miniaturized sensors can find extensive applications in navigation and maneuvering of underwater robots, artificial hearing systems, biomedical and microfluidic devices.

Highlights

  • Hair cells of the mammalian auditory and vestibular systems and hair cells of many non-mammalian vertebrates exhibit structural and functional similarity

  • This work demonstrates that extending the understanding of the sensing principles, materials, sensory architecture and functionality of biological hair cells can lead to novel sensors that are biocompatible, self-powered, sensitive, accurate and inexpensive

  • This paper, for the first time, presents the development of a biomimetic MEMS flow sensor that resembles the hair cell sensors found in nature by mimicking their structural architecture, materials and flow sensing principle

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Summary

Introduction

Hair cells of the mammalian auditory and vestibular systems and hair cells of many non-mammalian vertebrates (e.g., bullfrog; Fig. 1a) exhibit structural and functional similarity. Design of hair cell-like sensors for artificial MEMS flow sensors can offer several advantages over existing devices It can imitate novel structural and functional principles that are already proven to work in their native biological setting. Chen N. et al developed an artificial haircell sensor consisting of a silicon cantilever beam embedded with piezoresistive sensing elements at the hinge and a high-aspect-ratio cilium attached at the distal end[32] They demonstrated a threshold detection limit of 0.7 mm/s for sensing oscillatory flows in water generated using a dipole stimulus. Hyaluronic acid (HA)-based hydrogels, closely matching the material properties of the biological cupula, were synthesized and drop-cast on the stereocilia-like pillars to form artificial cupulas These serve as a mechanical connection between the external flow and the pillars and enhance sensitivity by increasing drag force. Unlike the silicon-based flow sensors developed in the past[25,27,28,31,32,33,34], our all-polymer devices are biocompatible, self-powered and inexpensive

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