Abstract
We report effect of the initial structural order on the resulting magnetic properties of manganese implanted TiO2 films. Different microstructures of as-grown TiO2 films, namely, amorphous, polycrystalline anatase, and epitaxial anatase, have been implant-doped with Mn+ up to a concentration of 5 at. %. We found that different initial structures lead to different defect and charge carrier concentrations and, as a result, strongly influence the magnetic properties upon implantation. Depending on the initial microstructure, paramagnetism, secondary phases related magnetic properties as well as ferromagnetism could be observed in the films.
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