Abstract
A physical analysis model of a surface acoustic wave (SAW) motor that is driven by frictional force resulting in nanometer elastic vibration has been proposed. In the case of the SAW motor, the vibration amplitude is from 3 to 30 nm at most. The vibration amplitude is almost the same as that of elastic deformation caused by the preload between a slider and a stator. In the analysis model, the elastic deformation, stick, and slip were considered. Numerical simulation was carried out successfully. Experimental results for the SAW motor at 9.6 MHz operation frequency were compared with simulation results. It was observed that a smaller projection slider with many projections has a high contact surface stiffness, thus, superior performances are obtained in terms of speed and thrust.
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