Abstract
In this work the coefficient of friction and wear resistance of SiOx incorporated DLC coatings were investigated. The tribological properties were analyzed in combination with AISI316L and ZrO2 counterbodies. The wear tracks and wear scars were analyzed using Raman spectroscopy, optical and scanning electron microscope. The specific wear rates of coatings and counterbodies were determined using the nanoindentation. The results show that tribological properties of a-C:H:SiOx coatings depend on the negative self-bias potential and counterbody material. The incorporation of SiOx resulted in increased wear of the coating and the counterbody.
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