Abstract
Since its first application toward displacement measurements in the early-1960s, laser feedback interferometry has become a fast-developing precision measurement modality with many kinds of lasers. By employing the frequency-shifted optical feedback, microchip laser feedback interferometry has been widely researched due to its advantages of high sensitivity, simple structure, and easy alignment. More recently, the laser confocal feedback tomography has been proposed, which combines the high sensitivity of laser frequency-shifted feedback effect and the axial positioning ability of confocal microscopy. In this paper, the principles of a laser frequency-shifted optical feedback interferometer and laser confocal feedback tomography are briefly introduced. Then we describe their applications in various kinds of metrology regarding displacement measurement, vibration measurement, physical quantities measurement, imaging, profilometry, microstructure measurement, and so on. Finally, the existing challenges and promising future directions are discussed.
Highlights
Laser feedback, known as laser self-mixing interference, was first applied as a displacement sensor by P.G.R
The with other methods, laser feedback interferometry has the advantages of compactness, non-contact, characteristic of the single-spot measurement limits the application in the full field measurement
Due to the high sensitivity of the laser feedback interferometry, the method can be θ and ΔL are measured at multiple angles in the experiment, the overdetermined equation used to measure the low transmittance materials, including calcium fluoride (CaF2 ), fused silica, and can be solved, and the refractive index of the sample can be obtained together with the thickness of zinc selenide (ZnSe)
Summary
Known as laser self-mixing interference, was first applied as a displacement sensor by P.G.R. In 1979, Otsuka reported the external optical feedback of LiNdP4 O12 lasers produced using a rotating glass plate [11] This kind of laser, known as the microchip laser, belongs to the class-B laser, of which the population decays slowly compared with the field [12]. The microchip laser has a high sensitivity compared with other kinds of lasers It has been applied in various fields, such as displacement sensing [13,14], velocimetry [15], vibrometry [16,17], particle detecting [18], angle measurement [19], and laser parameters measurement [20,21]. This paper provides an overall review of the research on frequency-shifted optical feedback measurements using a solid-state microchip laser.
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