Abstract
AbstractWe have developed a thermally stimulated narrow-band infrared source for sensing, spectroscopy and thermophotovoltaic applications by combining the unique advantages of two different structures: a photonic crystal that consists of an array of holes etched into a dielectric substrate and a periodically perforated metallic thin film. The dielectric photonic crystal structure is passive and exhibits a strong absorption at resonance. This acts as a radiation reservoir for the conductive array, which plays an active role through plasmon interactions and is opaque at all wavelengths except those at which coupling occurs. We have fabricated the arrays on silicon, silicon dioxide and silicon nitride substrates using MEMS-based processing methods. Infrared spectroscopic studies were used to characterize reflection, absorption and emission in the 2 to 14 micron range showing narrow band resonance. Spectral tuning was accomplished by controlling symmetry and lattice spacing of the arrays. The effects of the etch depth, metal and dielectric properties have been studied experimentally and theoretically. These structures have been used as an emitter/detector sensor chip to selectively detect industrial pollutants like carbon dioxide.
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