Frequency response of a focused SAW device based on concentric wave surfaces: simulation and experiment

Abstract

Focused interdigital transducers (FIDTs) based on concentric wave surfaces can excite surface acoustic wave (SAW) with high intensity, high beamwidth compression ratio and small localized area. In this paper, we developed a model to analyse the frequency response of a SAW device with FIDTs based on concentric wave surfaces. First, we constructed a focused SAW device by adopting a pair of FIDTs shaped as the concentric wave surface. To calculate its frequency response, a simulation model was established based on the 2D SAW filter model, effective permittivity approach and perturbation theory. Further, the focused SAW devices were designed and fabricated via the microelectromechanical system process technique. A good agreement between the simulated and measured results was found. Finally, the frequency responses of focused SAW devices based on concentric wave surfaces were discussed and some attractive features were found, such as less ripples of pass-band and high stop-band rejection. In addition, in comparison with the conventional SAW devices with uniform interdigital transducers, the focused SAW devices are more sensitive to variations in the focal area, instead of the whole delayline region. Accordingly, they are suitable to be applied to detect or manipulate some localized variations, such as acousto-optic or acousto-electric effects.