Abstract
In this contribution we focus on laser frequency noise properties and their influence on the interferometric displacement measurements. A setup for measurement of laser frequency noise is proposed and tested together with simultaneous measurement of fluctuations in displacement in the Michelson interferometer. Several laser sources, including traditional He-Ne and solid-state lasers, and their noise properties are evaluated and compared. The contribution of the laser frequency noise to the displacement measurement is discussed in the context of other sources of uncertainty associated with the interferometric setup, such as, mechanics, resolution of analog-to-digital conversion, frequency bandwidth of the detection chain, and variations of the refractive index of air.
Highlights
Laser interferometry is the fundamental measuring technique for length and all dimensional quantities in fundamental metrology as well as in demanding industrial applications
In applications that cover nanometrology, where the demands are the highest and high-speed scanning and, large bandwidth are needed. This is why in this contribution we have focused especially on the measurement of frequency noise of various laser sources intended for use in laser interferometry
We mainly concentrated on the short-term frequency noise of the laser head, which is one of the key parameters of the interferometer
Summary
Laser interferometry is the fundamental measuring technique for length and all dimensional quantities in fundamental metrology as well as in demanding industrial applications. The measurement range of laser interferometry covers the nano-world in the most precise devices like metrological scanning probe microscopes (SPMs), middle-sized objects, measured via coordinate measurement machines (CMMs), and up to kilometer distances in long-distance measurements [1,2,3,4,5]. In distance measurement, optics and mechanics designed according to the application, and the detection chain for acquisition, processing and evaluation of the interference signal including electronic hardware and software (demodulation and linearization techniques) [6,7,8,9,10,11,12,13,14]. Each component plays a role in the evaluation of the overall uncertainty
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