Abstract
We measure the mechanical thermal noise of soft silicon atomic force microscopecantilevers. Using an interferometric setup, we obtain a resolution down to10−14 m Hz−1/2 on a widespectral range (3–105 Hz). The low frequency behavior depends dramatically on the presence ofa reflective coating: almost flat spectra for uncoated cantilevers versus a1/f like trend for coated ones. The addition of a viscoelastic term in models of the mechanicalsystem can account for this observation. Use of Kramers–Kronig relations validate thisapproach with a complete determination of the response of the cantilever: a power law witha small coefficient is found for the frequency dependence of viscoelasticity due to thecoating, whereas the viscous damping due to the surrounding atmosphere is accuratelydescribed by the Sader model.
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