Abstract
In this work, the scalability between frequency and electromechanical coupling factor ( kt <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</sup> ) is demonstrated by shear horizontal surface acoustic wave (SH-SAW) resonators based on lithium niobate on insulator (LNOI). The dispersive characteristic is observed from the simulation, and is later substantiated by the fabricated devices with various wavelengths. A high electromechanical coupling factor ( kt <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</sup> ) of 25.1% was recorded throughout the measurement at a normalized LN thickness of 0.25. Linear response was also disclosed under different input power, verifying the adoption of LNOI topology. Thus, the measured results unveil the potential usage of SH-SAW resonators for wideband applications in communication systems.
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