Abstract
Freeform surfaces have drawn intensive attention in optical imaging and illumination field because of its great flexibility in optical design. However, the fabrication and testing of freeform surfaces remain a great challenge due to the arbitrary shape. Interferometry is among the high-accuracy testing method of optical surfaces. How to generate a non-rotationally symmetric wavefront similar with the surface under test and retrieve the phase from dense interferogram are hotspot issues. In this paper, we introduce two key technologies in non-null interferometry to solve the above-mentioned problems. The first is the design method of an off-axis catadioptric non-null compensator including a deformable mirror. The second is phase retrieval of single dense interferogram with digital moire phase shifting interferogram and wavelet analysis. Simulations demonstrate the feasibility of the proposed method.
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