Abstract
In this paper, a cross resonator pressure sensor is proposed to improve the detection accuracy of capacitor-detecting sensor. Considering electrostatic force and molecular force, the multi-field coupled dynamic equation of the sensor is established. By solving the dynamic equation, the equations for the mode function and the natural frequencies of the resonator are obtained. Using these equations, the natural frequency and mode function of the sensor are given. Changes of natural frequency of sensor with main parameters are studied. Influence of molecular force on the natural frequency is analyzed. Results show that within a considerable range of pressure, the natural frequencies increase approximately linearly with pressure. Under small pressure, small initial distance between resonator and base, and lower order modes, effects of the Van der Waals force on the natural frequencies are quite obvious.
Highlights
In 2005, Akhtar deposited 0.45 mm-thick polysilicon thin film on p-type silicon wafers by LPCVD process, which was used in the manufacturing of micro-resonant pressure sensors.[13]
In 2011, Li studied the dynamic characteristics of a micro resonance pressure sensor under thermal excitation.[15]
This paper proposes a micro resonant pressure sensor with cross-type resonator to increase the area in the middle of the resonator
Summary
Micro electro mechanical system (MEMS), known as microelectronic mechanical system, refers to micro system manufactured using micromachining technology and integrated circuit technology.[1,2,3] MEMS is a frontier field integrating mechanics, electronics, computer software and other disciplines, which has become one of the most rapidly developing science and technology.[4,5,6] In MEMS field, micro-resonance sensor has the most market and development potential.[7,8,9] Among micro-resonance sensors, micro-resonant pressure sensors have been widely used in fields such as aerospace and automobile, etc.[10,11,12]In 2005, Akhtar deposited 0.45 mm-thick polysilicon thin film on p-type silicon wafers by LPCVD process, which was used in the manufacturing of micro-resonant pressure sensors.[13]. Keywords Free vibration, micro sensor, pressure sensor, Van der Waals force, cross-type resonator, natural frequency The natural frequencies and modes of the micro resonant pressure sensor are calculated. Results show: Whether the modal function is even or odd, the natural frequencies of the micro sensor decrease with increasing length of the resonator.
Sign-in/Register to view highlights & summary Sign-in/Register to access full text options 
Free) 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a call
