Abstract
It has been established that IrO2 can improve the recording and stimulating efficiency of electrodes for neural activities. In this work, we have employed chemical bath deposition to fabricate an IrO2 nanotube array using an anodic alumina (AAO) template. We determined the optimal chemical bath condition including a suitable pH value to preserve the AAO template. After exploring various chemical bath deposition parameters, we produced a uniform, ordered, and high-aspect-ratio IrO2 nanotube array. We developed an acidic chemical bath for conformal IrO2 deposition at a thickness of 60 nm per batch. The results from grazing incidence X-ray diffractometer (GIXRD) suggest the successful formation of IrO2 film. The images obtained via scanning electron microscopy and qualitative elemental chemical analysis reveal free-standing iridium oxide nanotubes 400 nm in length after the removal of the AAO template by phosphoric acid. Electrochemical analysis of this IrO2 nanotube array in charge storage capacity (CSC) was performed to evaluate its potential as a neural-electronic interface electrode.
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