Abstract

We report on the fabrication and characterization of single-crystal Gallium Nitride (GaN) membrane organic gas sensor. The sensing device is based on the highly stable free-standing III-nitride membrane, and it is probed using non-destructive impedance spectroscopy. Monitoring the effect of a series of polar organic molecules on the electrochemical impedance spectrum of the sensing membrane in the frequency range of 1 mHz to 0.1 MHz at room temperature, we concluded that the sensor is highly sensitive to alcohols, in the gas phase, with selectivity that depends on the molecular weight and vapor pressure of the molecules. The highly robust and stable GaN crystalline membrane and the ability to test these sensors using impedance spectroscopy and electrochemical probing techniques suggest that single crystal GaN-based sensors can find a wide range of applications in harsh and extreme environments.

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