Abstract
In this study, using the nano and micro-indentation tests and finite element analysis (FEA), we investigated the fracture behaviors of diamond like carbon (DLC) on silicon in indentation state. Diamond like carbon coating of 3μm and 1.5μm thickness were deposited on polished (100) single crystal silicon substrates by radio frequency plasma assisted chemical vapor deposition (RF-PACVD), respectively. Fracture toughness of DLC films was calculated from the measured lengths of the cracks formed by nano and micro-indentation on each sample. We used various equations such as Lawn's and Liang's equation to calculate the fracture toughness. The effective fracture toughnesses of these DLC films were 1.2 ~1.3 MPam 0.5, calculated by Lawn's and Liang's equations. The true fracture toughness of DLC on silicon, excluding the portion of fracture toughness due to a substrate, was determined to be 4.0~5.1 MPam 0.5. DLC films with crack initiation and propagation were analyzed by finite element method.
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