Abstract

The repetitive control (RC) has been employed for high-speed tracking control of nanopositioning stages due to its abilities of precisely tracking periodic trajectories and rejecting periodic disturbances. However, in digital implementation, the sampling frequency should be integer multiple of the tracking frequency of the desired periodic trajectory. Otherwise, the rounding error would result in a significant degradation of the tracking performance, especially for the case of high input frequencies. To mitigate this rounding effect, the fractional repetitive control (FRC) technique is introduced to control the nanopositioning stage so as to precisely track high-frequency periodic inputs without imposing constraints on the sampling frequency of the digital control system. The complete procedure of controller design and implementation is presented. The techniques to deal with the problems of non-minimum phase system and fractional delay points number are described in detail. The proposed FRC is plugged into the proportional-integral control, and implemented on a custom-built piezo-actuated nanopositioning stage. Validation experiments are conducted, and the results show that the tracking errors caused by the rounding effect in the traditional RC approach are almost completely eliminated, when tracking sinusoidal waveforms with frequencies from 1000 Hz to 1587.3 Hz under the sampling frequency of 50 kHz, where the fractional parts being rounded vary from 0 to 0.5.

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