Fractional Order Based Modeling and Identification of Coupled Creep and Hysteresis Effects in Piezoelectric Actuators

Abstract

Accurate modeling and identification of piezoelectric actuators are increasingly demanded for intelligent micro–nano manufacturing to improve the accuracy of positioning and scanning. In this article, one coupled fractional-order creep and hysteresis model is established using only five parameters. Then, the properties of the coupled fractional-order creep and hysteresis are investigated under sinusoidal and step inputs. The identification approaches are thus proposed by leveraging the special characteristics of the proposed fractional-order model. Simulation and experimental studies are carried out to validate the effectiveness of the proposed fractional-order creep and Bouc–Wen hysteresis model. Additionally, model-based inversion feedforward is implemented to validate the parameter identification. The experimental results demonstrate the effectiveness of the modeling and parameter identification approaches.