Abstract

Ge-22 at. %Au/Au bilayer films annealed at various temperatures have been observed by transmission electron microscopy. The as-deposited bilayer film is composed of crystalline Ge,Au and metastable Ge0.4Au0.6 phases. The Au grain size is nonuniform, and no amorphous Ge is observed. During annealing at 60–350 °C, patterns with several wide branches are generated that are different from the dense branching fractals induced by crystallization of amorphous Ge in a-Ge/Au films. The fractal dimension of the pattern (measured by the box-counting method) increases with the annealing temperature. The agglomeration of small Au grains to coarse Au grains in the Ge-Au/Au bilayer film may be the mechanism for the fractal structure formation.

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