Abstract
We report on the formation of metal nanometre phase and fractal patterns insteel using metal vapour vacuum arc source ion implantation with high ionflux. The dense nanometre phases are cylindrical and welldispersed in the Ti-implanted layer with an ion flux up to 50 µA/cm2. The collision fractal pattern is formed in Ti-implanted steelwith an ion flux of 25 µA/cm2 and the disconnected fractal pattern isobserved with an ion flux of 50 µA/cm2. The average density ofnanometre phases decreases from 1.2×1011/cm2 to6.5×1010/cm2 as the ion flux increases from 25 µA/cm2 to50 µA/cm2. Fractal pattern growth is in remarkable agreement withSander's diffusion-limited aggregation model. The alloy clusters havediffused and aggregated in chains forming branches to grow a beautiful treeduring Ti implantation with an ion flux ranging from 75 µA/cm2 to85 µA/cm2. We discuss the model of fractal pattern growth during ionimplantation with high ion flux.
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