Abstract
Surface morphology and fractal properties of 3D nanostructures of the circular helical, square helical, and chevron were investigated. The nanostructures were deposited on the glass substrate using the oblique angle deposition technique. The surface properties of the nanostructures were investigated by atomic force microscopy (AFM) and field emission scanning electron microscopy (FESEM). The autocorrelation function (ACF), height-height correlation function (H(r)), power density function (PSDF), and Minkowski function are used for fractal characterization. The results showed that the circular helical nanostructure has more surface roughness, roughness exponent, and grain size compared to the square helical and chevron nanostructures. The fractal dimension of the surface of all three nanostructures showed that the chevron nanostructure with Df=2.88 has higher spatial complexity. The Minkowski functionals showed similar behavior for all three nanostructures. However, more negative and positive Minkowski connectivity was obtained for the circular helical nanostructure compared to the other two nanostructures.
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