Abstract
A conformal transformation technique is employed to determine the geometrical correction factor associated with four-point sheet resistance measurements of thin rectangular samples. Results are presented which are useful in identifying sample geometries for which the correction factor is insensitive to the placement of the four electrodes on the interior of the sample. The correction factors for corner-contacted rectangular samples (van der Pauw resistors) are shown to be highly sensitive to small variations in the length-to-width ratio, such as might be experienced when fabricating microelectronic structures. Experimental data which serve to confirm the validity of the analytical solution are provided for several cases of practical interest.
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