Abstract

Self-mixing interferometry (SMI) has been used to measure the distance and displacement. Although the principle of self-mixing interference is different conventional interference, we concluded that FFT analysis technique could also be used to detect the signal phase and increase the measurement precision of self-mixing interferometry. First the SMI signal is obtained by feeding the light from the target to cavity of laser diode, then it is pre-processed by an analog subtraction circuit to remove the overlapped output intensity due to the injection current modulation. Finally, SMI signal is analyzed by FFT phase detection method. Theoretical analysis and simulation calculations are presented. Experimentally, displacement of a PZT-driven target was measured with a precision of λ/50.

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