Abstract
In this note, a technique to determine the envelope peak positions of the axial intensity signal in continuously scanned structured illumination microscopy (CSSIM) for measuring surface profiles is introduced and verified with simulations. Based on the similarity between an axial intensity signal of CSSIM and a correlogram of white light scanning interferometry (WLSI), the Fourier domain analysis (FDA), widely used in WLSI, is adopted for reconstructing the height map of a sample. The continuous operation of CSSIM can significantly reduce the measurement time compared to the stop-and-measure procedure of previous structured illumination microscopy and the FDA method can improve the calculation speed because of using a single Fourier transformation as the result of simulations. It is also discussed that the FDA method can be applied to separate the upper layer and the bottom layer of the film structure, which results in overlapping axial intensity signals.
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