Abstract
We have developed a useful method for power multiplication of KrF laser light, called forward Raman pulse compression. In this method, a multi-pass forward Raman amplifier is used. Adjustment of incident timing between pump and Stokes light into each path provides efficient Raman energy conversion from long KrF laser to short pulse Stokes light. Even in the case of double path configuration, output Stokes was demonstrated to grow up to 1.3 times the pump intensity. By using an intersecting multi-path of Stokes and pump light, spatial non-uniformity of the output Stokes reduced to less than 5%.
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