Abstract

The atomization and coherent-conductivity properties of a hollow cathode discharge (HCD) plasma are analyzed. Under operating conditions of an Ar gas pressure of 38Pa and discharge current of 8mA the real sputtering coefficient of the process Ar+→Cd is obtained with a fair approach to accuracy to be Sk=1.15×10-1 atoms per ion. The back diffusion of sputtered atoms due to the gas ambient has been calculated and taken into account for this Sk-value.A different self-conductivity of the same ensemble of atoms (oriented and aligned) is measured by using the optogalvanic technique. This fact suggests that the ionization cross-section depends also on the coherence of the initial state.

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