Abstract

This paper reports on the synthesis of thin films of tungsten disulfide (WS2) by сhemical vapour deposition (CVD) using powders of sulfur and tungsten oxide obtained from tungsten metal powder. It is shown that the synthesized ultra-thin 2-dimensional (2D) films of WS2 have appropriate structural and optical properties suitable for their application in the manufacturing of electronic and optoelectronic devices. Proposed method for the synthesis of 2D few-layered WS2 can significantly accelerate the synthesis rate and will make it possible to control the stoichiometry and shapes of nanocrystals by controlling the amount of sulfur by magnetic mechanism. Moreover, obtained few-layered crystals demonstrate long-term stability to external factors, since the synthesis and the research carried out during the year. During this time, no signs of degradation of the TMDs structure were detected.

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