Abstract

This study aims to optimize the production conditions for forming graphene directly on a quartz substrate, using a carbon 60 (C60) thin film as a solid carbon source. In this experiment, we focused on the relationships between the thickness of the C60 film and the nickel (Ni) catalyst film and the heat treatment conditions. As the thicknesses of the C60 and Ni catalyst films increased, high-crystallinity multi-layered graphene was formed, however the optical transparency of the graphene film decreased. Scanning Electron Microscopy (SEM) observations and Raman scattering spectroscopy showed that after changing the atmosphere of the heat-treatment from an argon (Ar) gas to an Ar+ hydrogen (H2) gas, the optical transparency of the graphene film was remarkably improved, due to the migration and vaporization of the Ni film, and due to etching of the multi-layered graphene.

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